Title:
巻取り式成膜装置、および、巻取り式成膜装置の調整方法
Document Type and Number:
Japanese Patent JP7220127
Kind Code:
B2
Abstract:
To provide a winding type film deposition apparatus capable of suppressing defects from being formed on the surface of a sheet-like base material, and a method for controlling the winding type film deposition apparatus.SOLUTION: A winding type film deposition apparatus comprises: a main roller 23 having an outer peripheral surface 23S facing a film deposition source DS; a first roller R1 contacting to a thin film TM formed on the film deposition surface SS of sheet-like base material S fed from the main roller 23; and a second roller R2 contacting to a rear surface SR on the opposite side of the film deposition surface SS of the sheet-like base material S fed from the main roller 23. The starting torque of the first roller R1 is smaller than that of the second roller R2.SELECTED DRAWING: Figure 1
Inventors:
Masaki Hasegawa
Application Number:
JP2019111697A
Publication Date:
February 09, 2023
Filing Date:
June 17, 2019
Export Citation:
Assignee:
ULVAC, Inc.
International Classes:
C23C14/56; B65H23/188; B65H27/00
Domestic Patent References:
| JP2007302928A | ||||
| JP7056269Y2 | ||||
| JP2018132372A | ||||
| JP2014129565A | ||||
| JP54028782A |
Attorney, Agent or Firm:
Makoto Onda
Hironobu Onda
Hironobu Onda