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Patent Searching and Data


Title:
WIRE BONDING DEVICE
Document Type and Number:
Japanese Patent JP2000114308
Kind Code:
A
Abstract:

To provide a wire bonding device which can always apply a fixed bonding load to pads and leads, without being affected by the elasticity of the leaf spring for the bonding arm of a bonding head at applying the bonding load to the pads and leads by using the plate spring for supporting the bonding arm.

A wire bonding deice is provided with position detecting means 35, 11, 12, and 13 which detect the position of a capillary, a servo control circuit 10 which controls the drive for a linear motor 24, and an amplifier which outputs a correcting signal (b) which corrects the elasticity generated in an elastic body from the present position of a bonding arm which is detected by means of the position detecting means 35, 11, 12, and 13. The wire bonding device always applies a fixed bonding load to pads and leads by adding the correcting signal (b) from an amplifier 14 to a signal (a) from a servo control circuit 10.


Inventors:
HAYASE HIDEKI
Application Number:
JP28744698A
Publication Date:
April 21, 2000
Filing Date:
October 09, 1998
Export Citation:
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Assignee:
KAIJO KK
International Classes:
H01L21/60; H01L21/603; (IPC1-7): H01L21/60; H01L21/603
Attorney, Agent or Firm:
Shoji Hagiri