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Patent Searching and Data


Title:
WIRE BONDING DEVICE
Document Type and Number:
Japanese Patent JPH07106367
Kind Code:
A
Abstract:

PURPOSE: To make it possible to conduct accurately a wiring bonding work even if the positioning of a stem using a support jig is rough and to make it possible to heat the stem in a short time and efficiently even when the stem is heated.

CONSTITUTION: A stem 6 is transferred in such a way that it is housed in a stem housing part of a tray 7 and is transferred from this transfer path to a positioning means 9. On the means 9, the stem 6 is heated by a heater and at the same time, the positions of electrodes 3a and 3b of a semiconductor pellet 3 on the stem and the positions of leads 6a and 6b of the stem are respectively recognized by a recognition means, a capillary 13 is moved while being controlled on the basis of the recognition result and leads 6a and 6b are wire bonded to the electrodes 3a and 3b.


Inventors:
KATAJIMA KATSUHIKO
Application Number:
JP26561093A
Publication Date:
April 21, 1995
Filing Date:
September 29, 1993
Export Citation:
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Assignee:
TOSHIBA SEIKI KK
International Classes:
H01L21/60; (IPC1-7): H01L21/60