Title:
ワイヤソーの制御方法及びワイヤソー
Document Type and Number:
Japanese Patent JP4066112
Kind Code:
B2
Abstract:
A sensor measures a displacement of a sensor, and a control part of a wire saw calculates a sliding load in accordance with the measured displacement and an initial tension of the wire. Then, the control part compares the calculated cutting load with a preset reference value, and controls an ingot feed speed for a drive unit of a workpiece feed table in accordance with the results of the comparison.
Inventors:
Masashi Nagatsuka
Shigeru Okubo
Hiroshi Kawarai
Hiroshi Oishi
Keiichiro Asakawa
Junichi Matsuzaki
Shigeru Okubo
Hiroshi Kawarai
Hiroshi Oishi
Keiichiro Asakawa
Junichi Matsuzaki
Application Number:
JP1956699A
Publication Date:
March 26, 2008
Filing Date:
January 28, 1999
Export Citation:
Assignee:
Super Silicon Research Institute Co., Ltd.
International Classes:
B24B27/06; B23D57/00; B23D59/00; B28D5/00; H01L21/304
Domestic Patent References:
| JP63097449U | ||||
| JP11156694A | ||||
| JP2000117613A | ||||
| JP9300343A |
Attorney, Agent or Firm:
Kenzo Matsuura