Title:
Wire saw
Document Type and Number:
Japanese Patent JP6159088
Kind Code:
B2
Inventors:
Toyohiro Hoshiyama
Hirokazu Takahashi
Hirokazu Takahashi
Application Number:
JP2013002788A
Publication Date:
July 05, 2017
Filing Date:
January 10, 2013
Export Citation:
Assignee:
Toyo Advanced Technologies Co., Ltd.
International Classes:
B24B27/06; B24B55/02; B28D5/04; H01L21/304
Domestic Patent References:
| JP11099463A | ||||
| JP2000153460A | ||||
| JP2001328054A | ||||
| JP61121870A |
Attorney, Agent or Firm:
Maeda patent office