熱処理装置用ヒータの結線方法及び熱処理装置

Title:

熱処理装置用ヒータの結線方法及び熱処理装置

Document Type and Number:

Japanese Patent JP4618920

Kind Code:

B2

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Inventors:

Takanori Saito
Choei Nagauchi
Tsuyoshi Takizawa
Ikeman Karuki

Application Number:

JP2001096481A

Publication Date:

January 26, 2011

Filing Date:

March 29, 2001

Export Citation:

Assignee:

東京エレクトロン株式会社

International Classes:

H01L21/205; H05B3/00; F27B5/14; F27D11/02; H01L21/31

Domestic Patent References:

Attorney, Agent or Firm:

Kimura Mitsuru

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