Title:
HIGH FREQUENCY INDUCTION COUPLING PLASMA MASS SPECTROMETER
Document Type and Number:
Japanese Patent JP3214628
Kind Code:
B2
Abstract:
PURPOSE: To remove clogged materials from meshes by issuing control signals to a mass flow controller from an operation/control unit when a nebulizer starts to be blocked up, and supplying argon gas to the nebulizer at a large flow rate or in a pulsating current.
CONSTITUTION: When a nebulizer 5 starts to be blocked up, pressure of argon gas flowing in a passage between a mass flow controller 21 and the nebulizer 5 is increased, and a flow rate of the gas flowing in the passage also starts to be decreased. Thereby, when an operation/control unit 22 judged from a pressure signal detected by a pressure gage 23 and a flow rate signal detected by a flow meter 24 that the nebulizer 5 started to be blocked up, a large flow rate signal or a pulsating current signal is issued to the controller 21. Thereby, since the argon gas starts to be supplied to the nebulizer 5 at a large flow rate or in a pulsating current, clogged materials are be removed from meshes in the nebulizer 5, so that a damage caused to the nebulizer can be reduced.
Inventors:
Hideki Matsumoto
Application Number:
JP28611491A
Publication Date:
October 02, 2001
Filing Date:
October 31, 1991
Export Citation:
Assignee:
Yokogawa Electric Corporation
International Classes:
G01N27/62; H01J49/04; H01J49/26; (IPC1-7): H01J49/04
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