Title:
WORK DEVICE AND CAMERA CHECK METHOD
Document Type and Number:
Japanese Patent JP2023170361
Kind Code:
A
Abstract:
To detect an angle of a camera or displacement which occurs in a scale.SOLUTION: A visual field V51 including a center Cw of a target component Wpt is imaged by a wafer camera 51, and a pre-movement image I1 (first image) including the center Cw of the target component Wpt is acquired. A relative moving amount M of a center Cv of the visual field V51 with respect to the center Cw of the target component Wpt required for matching the center Cv to the center Cw of the target component Wpt is calculated based on the pre-movement image I1, and the wafer camera 51 is moved just for the moving amount M with respect to a wafer W by an X-axis motor 356 and a Y-axis motor 355. A post-movement image I2 (second image) including the center Cw of the target component Wpt is acquired and based on a positional relation between the center Cv and the center Cw in the post-movement image I2, an angle of the wafer camera 51 or a displacement amount of a scale is calculated.SELECTED DRAWING: Figure 5
Inventors:
KASUGA DAISUKE
IMAEDA KAITO
IMAEDA KAITO
Application Number:
JP2022082052A
Publication Date:
December 01, 2023
Filing Date:
May 19, 2022
Export Citation:
Assignee:
YAMAHA MOTOR CO LTD
International Classes:
H01L21/52; H05K13/04; H05K13/08
Attorney, Agent or Firm:
Shoichi Swing
Kazumasa Ohnishi
Kazumasa Ohnishi