To provide a work function measuring instrument capable of measuring the accurate work function of a sample even if the work function of a probe is unknown.
The work function measuring instrument 100A is constituted so as to calculate the work function of the probe 2A of a conductive cantilever 1A from the known work function value of each region of a standard sample 3A calculated by photoelectron spectroscopy and the surface potential value of each region of the standard sample 3A measured by a scanning Kelvin force microscope having the conductive cantilever 1A. Next, the scanning Kelvin force microscope having the conductive cantilever 1A wherein the work function A of the probe 2A is concretely calculated is used to measure the surface potential (y) of an unknown sample different from the standard sample 3A. The work function (x) in the microregion of the unknown sample can be calculated on the basis of a relational expression of y=(A-x)/e from the work function A of the probe 2A of the conductive cantilever 1A and the surface potential (y) of the unknown sample.
Toshio Morita
Yoshihei Nakamura
Yutaka Horii
Hisato Noda
Masayuki Sakai