WORK FUNCTION MEASURING METHOD, APPARATUS THEREFOR AND SAMPLE HOLDER

Title:

WORK FUNCTION MEASURING METHOD, APPARATUS THEREFOR AND SAMPLE HOLDER

Document Type and Number:

Japanese Patent JP3419662

Kind Code:

B2

Abstract:

PROBLEM TO BE SOLVED: To accurately measure work function regardless of material quality without being affected by a surface state.
SOLUTION: A first process wherein the surface of a movable electrode 12 is irradiated with exciting light Lλ, while a wavelength is successively scanned to calculate light energy at a time of the discharge of photoelectrons from the surface of the movable electrode, a second process vibrating the movable electrode 12 in constant frequency so as to allow the same to advance and retreat with respect to a sample S (a) to measure the potential difference between the movable electrode 12 and the sample S, and a third process calculating the value wherein the light energy calculated in the previous process is added to this potential difference (b), are provided.

Inventors:

Yoshiyuki Nakashima
Yukio Nakamura

Application Number:

JP27358297A

Publication Date:

June 23, 2003

Filing Date:

September 19, 1997

Export Citation:

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