Title:
ワーク保持装置
Document Type and Number:
Japanese Patent JP5675377
Kind Code:
B2
Inventors:
桑名 一孝
Application Number:
JP2011005158A
Publication Date:
February 25, 2015
Filing Date:
January 13, 2011
Export Citation:
Assignee:
株式会社ディスコ
International Classes:
H01L21/304; B24B7/22; H01L21/683
Attorney, Agent or Firm:
Hiroyoshi Aoki
Masayuki Amada
Yoshimasa Okada
Toru Sugano
Mizokuchi 勉
Masayuki Amada
Yoshimasa Okada
Toru Sugano
Mizokuchi 勉