Title:
WORK-PIECE CUTTING METHOD AND CHUCK TABLE OF CUTTING DEVICE
Document Type and Number:
Japanese Patent JP2019118982
Kind Code:
A
Abstract:
To provide a work-piece cutting method by which occurrence of breakage and corner crack of a rear face of a work-piece can be suppressed with a simple configuration even for a thin work-piece and a work-piece of a small chip size, and a chuck table for use in the method.SOLUTION: A method by which a work-piece 11, which is bonded to a dicing tape which is so fixed as to close an opening of an annular frame, and in which a device is formed in each of areas of which a surface is divided by plural crossing division planned lines, is held by an adsorption face 54a of a chuck table 50 via the dicing tape, and the work-piece is cut by a cutting blade 76. On the adsorption face of the chuck table, plural crossing narrow grooves 68, 80, which are communicated with a suction source 70 via a suction passage, are formed. This method comprises: a suction holding step at which the work-piece, which is located in a direction in which extension direction of the division planned line and the narrow groove cross each other, is sucked and held by the chuck table; and a division step at which the work-piece is cut and divided by the cutting blade.SELECTED DRAWING: Figure 5
Inventors:
YAMAMOTO SETSUO
OKAMURA TAKU
OKAMURA TAKU
Application Number:
JP2017254124A
Publication Date:
July 22, 2019
Filing Date:
December 28, 2017
Export Citation:
Assignee:
DISCO ABRASIVE SYSTEMS LTD
International Classes:
B24B27/06; B24B41/06; B24B49/08; H01L21/301; H01L21/683
Domestic Patent References:
JPH11307619A | 1999-11-05 | |||
JP2017200872A | 2017-11-09 | |||
JP2016119399A | 2016-06-30 |
Foreign References:
US5029418A | 1991-07-09 |
Attorney, Agent or Firm:
Akira Matsumoto
Tomohiro Okamoto
Kasahara Takahiro
Tomohiro Okamoto
Kasahara Takahiro