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Patent Searching and Data


Title:
WORK ROTATING AND PROCESSING APPARATUS
Document Type and Number:
Japanese Patent JP08203818
Kind Code:
A
Abstract:

PURPOSE: To prevent the central portion of the surface of a workpiece from being unevenly processed, and make the processed condition of the central portion almost consistent with that of the peripheral portion in a work rotating and processing apparatus for the improvement of product quality.

CONSTITUTION: A work rotating and processing apparatus consists of a turn table 2 that rotates with a workpiece 1 to be processed chucked on its upper face; a rotary shaft 3 that rotates the turn table; and a driving source M that gives rotational driving force to the rotary shaft. The rotary shaft 3 includes the rotation shaft 3a on the axis of which the turn table 2 is spun; and a revolution shaft 3b that revolves the turn table around another axis. The rotation shaft 3a and the revolution shaft 36 are staggered so that the turn table 2 rotates and revolves simultaneously. This prevents the central portion of the surface of a workpiece from being unevenly processed and makes the processed condition of the central portion almost consistent with that of the peripheral portion, which leads to the enhanced quality of products.


Inventors:
Nakaune, Hidehiko
Application Number:
JP1995000023294
Publication Date:
August 09, 1996
Filing Date:
January 19, 1995
Export Citation:
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Assignee:
HITACHI ELECTRON ENG CO LTD
International Classes:
G03F7/16; H01L21/027; G03F7/16; H01L21/02; (IPC1-7): H01L21/027; G03F7/16