To extend a lifetime of a working probe used for a mechanical removal process with an atomic force microscope and to reduce a drift in a probe position during working.

The back face temperature of a working probe 1 penetrating a cantilever 3, is monitored through a minute thermocouple 2 stuck and fixed to the back face 1a; and when the temperature exceeds a predetermined temperature, the working is stopped. The working position is corrected by predicting a drift of the probe position caused by thermal expansion of the cantilever 3 due to the temperature increase of the probe 1, based on the measured temperature of the probe 1. The temperature of the probe 1 is controlled within a predetermined range to continue working by heater-heating or cooling the back face 1a while monitoring through the minute thermocouple 2 stuck and fixed to the back face of the probe 1.