PURPOSE: To provide a working device using the high speed atomic rays capable of working at high speed and efficiently by supplying optical energy, laser beam, radical particles, etc., to the working surface of a work in a working device with using high speed atomic rays.
CONSTITUTION: In addition to a high speed atomic rays source 1, the device is provided with the source 8 having one or more of an optical energy source, laser beam source, radical particle source, electron source, X rays or radiation rays source (α-rays, β-rays, γ-rays) and ion source, the work placed in a vacuum chamber or outside vacuum is irradiated with a high speed atomic rays as well as with combining one or more of an optical energy, laser beam, electron beam, X rays or radiation rays and ion particle, and a work is worked.