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Patent Searching and Data


Title:
WORKING DEVICE WITH CUTTING TOOL
Document Type and Number:
Japanese Patent JP2012024885
Kind Code:
A
Abstract:

To provide a working device with a cutting tool capable of suppressing the thermal expansion of a chuck table without causing tearing at a turning surface of a material to be worked and preventing the adhesion of cutting chips to the material to be worked.

The working device with the cutting tool includes: the chuck table 52 with a holding surface for holding the material to be worked; a turning means with the cutting tool 33 for cutting the material to be worked held at the chuck table 52; and a cooling water supply means 6 with a jet nozzle 61 for jetting cooling water to the turning surface of the material to be worked held at the chuck table 52 moving in a working area where the material to be worked is cut by a turning means. The jet nozzle 61 jets the cooling water from the rotational-direction upstream side of the cutting tool 33 to the rotational-direction downstream side thereof in the working area.


Inventors:
NAMIOKA SHINICHI
Application Number:
JP2010165699A
Publication Date:
February 09, 2012
Filing Date:
July 23, 2010
Export Citation:
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Assignee:
DISCO CORP
International Classes:
B23Q11/10; B23B3/24; B23B25/00; B23C9/00; B23D5/00; H01L21/60
Domestic Patent References:
JPH0425309A1992-01-29
JP2005327838A2005-11-24
JP2008221388A2008-09-25
JP2004303855A2004-10-28
JP2006181700A2006-07-13
JPH11267940A1999-10-05
Attorney, Agent or Firm:
Naozumi Ono
Sachiko Okunuki