Title:
WORKING METHOD FOR THIN WORKPIECE
Document Type and Number:
Japanese Patent JP2004034285
Kind Code:
A
Abstract:
To provide a material removing working method for a flat workpiece capable of achieving high throughput and a highly smooth workpiece.
During the working of the workpiece, the workpiece load by the pressure is sharply decreased at least once and then increased again while the amount of auxiliary material supplied is decreased as the pressure increases.
Inventors:
HEIMES TIMON
DUMM HERMANN
DUMM HERMANN
Application Number:
JP2003189678A
Publication Date:
February 05, 2004
Filing Date:
July 01, 2003
Export Citation:
Assignee:
WACKER SILTRONIC HALBLEITERMAT
International Classes:
B24B57/02; B24B7/17; B24B37/04; B24B49/16; H01L21/304; H01L21/306; (IPC1-7): B24B37/00; B24B57/02; H01L21/304
Attorney, Agent or Firm:
Toshio Yano
Toshiomi Yamazaki
Takuya Kuno
Einzel Felix-Reinhard
Reinhard Einsel
Toshiomi Yamazaki
Takuya Kuno
Einzel Felix-Reinhard
Reinhard Einsel