Title:
WORKPIECE FLOATATION TRANSPORTER
Document Type and Number:
Japanese Patent JP2017029948
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a workpiece transporter that applies a uniform coating treatment to a workpiece over a width direction by securing a predetermined floatation amount at a side end part in a workpiece width direction to maintain a workpiece flatness over the whole region in the workpiece width direction.SOLUTION: The distribution density of jet ports 121 and suction ports 123 arranged in a width direction side end part A2ab of a coating treatment region in a transportation path to face a width direction side end part Wb of a workpiece W is higher than that of jet ports 121 and suction ports 123 arranged in a width direction central part A2aa of a coating treatment region in the transportation path to face a width direction side end part Wa of the workpiece W.SELECTED DRAWING: Figure 5
Inventors:
ITO AKIHIKO
SATO HIKARI
TSUNODA KOICHI
KANAI HITOSHI
SATO HIKARI
TSUNODA KOICHI
KANAI HITOSHI
Application Number:
JP2015154577A
Publication Date:
February 09, 2017
Filing Date:
August 04, 2015
Export Citation:
Assignee:
OILES INDUSTRY CO LTD
International Classes:
B05C13/02; B65G49/06; B65G51/03; H01L21/027; H01L21/677
Attorney, Agent or Firm:
Takashi Tsuno
Kato coming
Takeharu Hirabayashi
Mutsumi Hoshi
Kato coming
Takeharu Hirabayashi
Mutsumi Hoshi
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