Title:
WORKPIECE HOLDER
Document Type and Number:
Japanese Patent JP2018058165
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a workpiece holder which can stably rotate a workpiece to process the workpiece having good surface accuracy.SOLUTION: A workpiece holder holds a workpiece which is a process object and includes: a rotor in which a workpiece bonding jig including the workpiece bonded thereto is attached and which rotates with the workpiece bonding jig; a receiving member which is formed with a passage for supplying a fluid to an interface with the rotor and receives the rotor; and a housing which houses the receiving member and is formed with a compression hole for supplying a compressed fluid to the receiving member.SELECTED DRAWING: Figure 1
Inventors:
ISHIZAKI KOJI
KAWARABATA SATOSHI
KAWARABATA SATOSHI
Application Number:
JP2016197503A
Publication Date:
April 12, 2018
Filing Date:
October 05, 2016
Export Citation:
Assignee:
OLYMPUS CORP
International Classes:
B24B13/005; B23Q3/08; B24B41/06
Attorney, Agent or Firm:
Sakai International Patent Office
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