Title:
WORKPIECE HOLDING MEMBER
Document Type and Number:
Japanese Patent JP2011156634
Kind Code:
A
Abstract:
To improve strength of a workpiece holding member for holding a workpiece to make the member hard to get damaged.
A resin solution is applied on a base material 1 and wet-solidified to form a foaming layer 2. The base material 1 on the rear of the foaming layer 2 is exfoliated. The foaming layer 2 is sandwiched between smooth members 3, and heat and pressure are applied. Strength is improved by crushing bubbles or the like on front and rear faces 2a-1 and 2b-1 of the foaming layer 2 to make dense. A density distribution of the foaming layer 2 exhibits a gradually inclined distribution as it is smaller at the center than on the front and rear faces in a thickness direction.
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Inventors:
TAMAGAWA TOMOHITO
KAWABATA KATSUMASA
MIZUMOTO HIDENOBU
KAWABATA KATSUMASA
MIZUMOTO HIDENOBU
Application Number:
JP2010021819A
Publication Date:
August 18, 2011
Filing Date:
February 03, 2010
Export Citation:
Assignee:
NITTA HAAS INC
International Classes:
B24B37/30; H01L21/304
Domestic Patent References:
| JPH0741169A | 1995-02-10 | |||
| JP2002355754A | 2002-12-10 | |||
| JP2005011972A | 2005-01-13 | |||
| JP2004345023A | 2004-12-09 | |||
| JP2008055528A | 2008-03-13 | |||
| JP2004090119A | 2004-03-25 | |||
| JP2004090121A | 2004-03-25 | |||
| JP2005153053A | 2005-06-16 | |||
| JP2004154920A | 2004-06-03 | |||
| JP2007044844A | 2007-02-22 |
Attorney, Agent or Firm:
Kazuhide Okada
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