Title:
WORKPIECE MACHINING METHOD AND MACHINING DEVICE AS WELL AS JOINT UNIT
Document Type and Number:
Japanese Patent JP2015213975
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a workpiece machining method in which an ingot for manufacturing a substrate of an electron device, etc., is used as a workpiece, and the workpiece can be machined by few manufacturing processes without grinding the end face thereof.SOLUTION: A first main spherical joint 1a is stuck while being positioned in a reference axis O in one end face of a workpiece W, and a second main spherical joint 1b is stuck while being positioned in the reference axis O in the other end face of the workpiece W. A first sub-spherical joint 11a swingably coming into contact with the main spherical joint 1a is provided in a first rotation shaft 21a, and a second sub-spherical joint 11b swingably coming into contact with the main spherical joint 1b is provided in a second rotation shaft 21b. While the workpiece W is rotated by the rotation shafts 21a, 21b, an outer circumferential surface of the workpiece W is subjected to the grinding work in parallel to the reference axis O by a grinding wheel.
Inventors:
ITO HIROYUKI
KAWAHARA RYUNOSUKE
KAWAHARA RYUNOSUKE
Application Number:
JP2014097368A
Publication Date:
December 03, 2015
Filing Date:
May 09, 2014
Export Citation:
Assignee:
BBS KINMEI CO LTD
International Classes:
B24B1/00; B24B5/04; B28D5/02; H01L21/304
Domestic Patent References:
JP2000026200A | 2000-01-25 | |||
JPH11333829A | 1999-12-07 | |||
JPH02129505A | 1990-05-17 | |||
JPH11156849A | 1999-06-15 | |||
JP3050774U | 1998-07-31 | |||
JPH04343635A | 1992-11-30 |
Foreign References:
KR20110008390A | 2011-01-27 |
Attorney, Agent or Firm:
Yamato Tsutsui
Yoshitaka Kozuka
Akiko Tsutsui
Yoshitaka Kozuka
Akiko Tsutsui
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