Title:
WORKPIECE MACHINING METHOD
Document Type and Number:
Japanese Patent JP2010240786
Kind Code:
A
Abstract:
To provide a workpiece machining method capable of simply forming high-precision fine holes, being excellent in machinability in the depth direction and having a high aspect ratio, in a workpiece formed with a heat-mode resist layer.
The workpiece machining method includes at least: a heating step for heating a heat-mode resist layer formed on a substrate; and a fine-hole forming step for forming fine holes by irradiating the heat-mode resist layer in a heated state with a laser beam.
Inventors:
USAMI YOSHIHISA
Application Number:
JP2009093084A
Publication Date:
October 28, 2010
Filing Date:
April 07, 2009
Export Citation:
Assignee:
FUJIFILM CORP
International Classes:
B81C99/00; B23K26/00; B23K26/36; B41M5/26; G11B7/26
Attorney, Agent or Firm:
Koichi Hirota
Yoshihiro Nagare
Naoko Matsuda
Hiroshi Ikeda
Yoshihiro Nagare
Naoko Matsuda
Hiroshi Ikeda