Title:
WORKPIECE PROCESSING DEVICE
Document Type and Number:
Japanese Patent JP2022100939
Kind Code:
A
Abstract:
To provide a workpiece processing device which can prevent a process liquid supplied from a nozzle from entering an opening provided at a base plate by providing a first drip-proof mechanism and a second drip-proof mechanism.SOLUTION: A workpiece processing device of the invention includes: a base plate 65 which partitions a space for processing a workpiece at the lower side; a processing module 70A which processes the workpiece; process liquid supply nozzles 83, 84 which supply a process liquid to the workpiece; a module driving device 71A; and a first drip-proof mechanism 91 and a second drip-proof mechanism 94. The base plate 65 has an opening 66 so that the processing module 70A can move in a horizontal direction. The first drip-proof mechanism 91 and the second drip-proof mechanism 94 prevent the process liquid supplied from the process liquid supply nozzles 83, 84 from entering through the opening 66.SELECTED DRAWING: Figure 6
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Inventors:
TAJIMA KAZUHIRO
YAMANOBE HOKUTO
YAMANOBE HOKUTO
Application Number:
JP2020215232A
Publication Date:
July 06, 2022
Filing Date:
December 24, 2020
Export Citation:
Assignee:
EBARA CORP
International Classes:
B24B55/06; B23Q11/08; B24B9/00; B24B41/02; B24B55/02; H01L21/304
Attorney, Agent or Firm:
Tetsuya Hirosawa
Yutaro Watanabe
Goto Manabu
Mitsuhiro Kanazawa
Yutaro Watanabe
Goto Manabu
Mitsuhiro Kanazawa