ワーク加工装置、砥石、およびワーク加工方法

Japanese Patent JP7093875

B2

A rotatable disc-like grinding stone 5 comprises a convex grinding portion 5b in the outer peripheral portion thereof. The cross-sectional shape of the convex grinding portion 5b passing through a rotational axis 6 of the grinding stone 5 is convex toward the outer peripheral side. The grinding stone 5 is shaped with an arc-like portion 5e at least in each of both end portions thereof in the thickness direction. In order to form a disc-like workpiece 2 into a desired cross sectional shape, the workpiece 2 and the grinding stone 5 are arranged parallel to each other, the grinding stone 5 is rotated, and the workpiece 2 is rotated around a rotational axis 3 parallel to the rotational axis 6 of the grinding stone 5, while the grinding stone 5 is moved relative to the workpiece 2 according to a moving condition calculated on the basis of the curvature radius of the arc-like portion 5e of the grinding stone 5, such that a contact portion between the convex grinding portion 5b and the workpiece 2 moves along the desired cross-sectional shape of the workpiece 2. The curvature radius of the arc-like portion 5e of the grinding stone 5 is at least 10 times the thickness of the workpiece 2.

Ichiro Katayama
Yutaka Aoki

JP2021105043A

June 30, 2022

June 24, 2021

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Ichiro Katayama
Yutaka Aoki

B24B9/00; B24B53/053; B24B53/07; B24B55/00; B24D5/00; B24D5/14; H01L21/304

JP2015223669A
JP2020171971A
JP2019166598A
JP2000042887A
JP2006021279A
JP2003025198A
JP11345788A
JP2020171970A
JP2019198899A
JP2014220297A
JP2009142979A

Akio Miyazaki
Masaaki Ogata

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