Title:
WORKPIECE PROCESSOR AND TEACHING METHOD
Document Type and Number:
Japanese Patent JP2014192356
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a workpiece processor and a teaching method capable of easily and reliably performing teaching.SOLUTION: A teaching method is provided for performing teaching on a workpiece processor which accommodates a plurality of workpieces in a reaction chamber and performs predetermined processing on the accommodated workpieces. The workpiece processor stores a work content in performing teaching work by operating a predetermined key, and voice guidance information for performing voice output of a guidance including a teaching standard. The teaching for the workpiece processor is performed by making an operator performing the teaching work operate the predetermined key according to a voice guidance output on the basis of the voice guidance information.
Inventors:
YAMAMOTO MASAKAZU
Application Number:
JP2013066716A
Publication Date:
October 06, 2014
Filing Date:
March 27, 2013
Export Citation:
Assignee:
TOKYO ELECTRON LTD
International Classes:
H01L21/677; B25J9/22; C23C16/44; H01L21/205
Domestic Patent References:
| JP2004106078A | 2004-04-08 | |||
| JP2006140350A | 2006-06-01 | |||
| JP2009297877A | 2009-12-24 |
Attorney, Agent or Firm:
Mitsuru Kimura