PURPOSE: To enable the adjustment obtaining desired magnification, and make the constitution of an equipment compact by combining a plane diffraction grating or a pair of paraboloidal mirrors commonly possessing a focus, or these ones.

CONSTITUTION: A first and a second paraboloidal mirrors 15, 16 commonly possess a focus 17. X-rays 4 radiated from a plane diffraction grating 11 pass through a slit 11a, and enter the reflecting surface 15a of the first paraboloidal mirror 15. The X-rays 4 are reflected along an optical path as if radiated from a focus 17, enter the reflecting mirror 16a of the second paraboloidal mirror 16, and are converted into parallel X-rays 6. The spot diameter Δ3 is magnified by several times or more as compared with the spot diameter Δ2 of the X-rays 4. The X-rays 6 are projected on a wafer 8 via an X-ray mask 20, and a specified pattern is exposed. Thereby, the spot diameter is magnified by a specified magnification ratio, and the equipment is made compact.