To provide an X-ray analysis method and device with optical axis adjusting function, capable of precisely performing optical axis adjustment, regardless of the direction of placing an optical axis adjusting halved sample.
Distribution measurement of X-ray intensity is performed at two arbitrary expected positions 31 and 32 of a diaphragm (X-ray analysis means) 5, while the halved sample S is rotated about its axis by a θ-stage 17 for each moving position of an r-stage 16, whereby the moving position of the r-stage 16 and the rotating angle of the θ-stage 17, where the reference line L of the halved sample S, is parallel to a diaphragm moving axis 36 are detected. According to this, since the state where the reference line L of the halved sample S passing the rotating center of the θ-stage 17 is parallel to the diaphragm moving axis 36 can be detected, regardless of the placement direction of the halved sample S on the θ-stage 17, the rotation center of the θ-stage 17 in the moving position of the r-stage 16 is made to match the expected position of the diaphragm, and the rotation center of the θ-stage 17 is further made to match with a measuring origin on an image, whereby optical axis adjustment can be performed accurately.
KAWAHARA NAOKI
Masashi Noda
Kenro Tsutsumi
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