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Title:
X-RAY ANALYZER AND X-RAY ANALYSIS METHOD
Document Type and Number:
Japanese Patent JP2010048727
Kind Code:
A
Abstract:

To provide an X-ray analyzer and an X-ray analysis method that have improved operability for locating a measurement position and can measure distance precisely.

The X-ray detector includes: an X-ray bulb 2 for applying primary X rays X1 to an irradiation point on a sample S; an X-ray detector 3 for detecting characteristic X rays and scattered X rays radiated from the sample S for outputting a signal including energy information of the characteristic X rays and scattered X rays; an analyzer 4 for analyzing a signal; a first observation system 5 capable of optically observing an area on the sample S to determine the irradiation point P1; and a second observation system 6 that has a depth of field smaller than that of the first observation system 5 and can observe a narrow area optically and measure distance to the determined irradiation point P1 by adjusting a focus.


Inventors:
MATOBA YOSHITAKE
Application Number:
JP2008214716A
Publication Date:
March 04, 2010
Filing Date:
August 22, 2008
Export Citation:
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Assignee:
SII NANOTECHNOLOGY INC
International Classes:
G01N23/223
Domestic Patent References:
JP2004144478A2004-05-20
JP2001021510A2001-01-26
JP2001056306A2001-02-27
JP2004184314A2004-07-02
JP2007292476A2007-11-08
JPH05118999A1993-05-14
JP2004144478A2004-05-20
JP2001021510A2001-01-26
JP2001056306A2001-02-27
JP2004184314A2004-07-02
Attorney, Agent or Firm:
Hideyuki Sugiura