To provide an X-ray analyzer and an X-ray analysis method that have improved operability for locating a measurement position and can measure distance precisely.
The X-ray detector includes: an X-ray bulb 2 for applying primary X rays X1 to an irradiation point on a sample S; an X-ray detector 3 for detecting characteristic X rays and scattered X rays radiated from the sample S for outputting a signal including energy information of the characteristic X rays and scattered X rays; an analyzer 4 for analyzing a signal; a first observation system 5 capable of optically observing an area on the sample S to determine the irradiation point P1; and a second observation system 6 that has a depth of field smaller than that of the first observation system 5 and can observe a narrow area optically and measure distance to the determined irradiation point P1 by adjusting a focus.
JP2004144478A | 2004-05-20 | |||
JP2001021510A | 2001-01-26 | |||
JP2001056306A | 2001-02-27 | |||
JP2004184314A | 2004-07-02 | |||
JP2007292476A | 2007-11-08 | |||
JPH05118999A | 1993-05-14 | |||
JP2004144478A | 2004-05-20 | |||
JP2001021510A | 2001-01-26 | |||
JP2001056306A | 2001-02-27 | |||
JP2004184314A | 2004-07-02 |
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