Title:
X-RAY APPARATUS
Document Type and Number:
Japanese Patent JP2020095906
Kind Code:
A
Abstract:
To provide an X-ray apparatus capable of moving an electron collision position of a target and suppressing a rise of an internal temperature while using a structure in which an X-ray is emitted from a surface on a side opposite to a surface of the target where an electron beam collides.SOLUTION: An X-ray apparatus 1 comprises an X-ray generation device 4. The X-ray generation device 4 comprises a target holding part 52 for holding a target 42, an electron source 41, a tube container 45, a coupling member 51, and a cooling mechanism 54. In the X-ray generation device 4, irradiation with electrons is performed toward the target 42 from the electron source 41 provided in the tube container 45, and an X-ray is emitted from the target 42. Also, the coupling member 51, which couples the tube container 45 and the target holding part 52, is cooled by the cooling mechanism 54. Thus, by directly cooling the coupling member 51, which obstructs heat radiation, by means of the cooling mechanism 54, the inside of the X-ray generation device 4 is cooled, which makes it possible to suppress a rise of a temperature.SELECTED DRAWING: Figure 2
Inventors:
TAMURA TOMOMI
Application Number:
JP2018234461A
Publication Date:
June 18, 2020
Filing Date:
December 14, 2018
Export Citation:
Assignee:
SHIMADZU CORP
International Classes:
H01J35/24; H01J35/08
Attorney, Agent or Firm:
Yoshimoto Riki
Masato Shintaku
Masato Shintaku