Title:
X線基板検査装置
Document Type and Number:
Japanese Patent JP4075166
Kind Code:
B2
Inventors:
Hideo Hongo
Toba Hiromon
Udagawa Isao
Toba Hiromon
Udagawa Isao
Application Number:
JP33871898A
Publication Date:
April 16, 2008
Filing Date:
November 30, 1998
Export Citation:
Assignee:
Matsushita Electric Industrial Co., Ltd
International Classes:
G01N23/04; H05G1/44; G01N23/18; G21K5/02; H05K3/00
Domestic Patent References:
| JP2163642A | ||||
| JP10192273A | ||||
| JP10064693A | ||||
| JP61208797A | ||||
| JP8241796A |
Attorney, Agent or Firm:
Fumio Iwahashi
Hiroki Naito
Daisuke Nagano
Hiroki Naito
Daisuke Nagano