PURPOSE: To provide an X-ray two-dimensional detector with a high voltage interrupting protecting device of which breakage and deterioration can be prevented even in an abnormal state such as reduction of vacuum.
CONSTITUTION: Microchannel plates (MCP) 11, 12 for photoelectrically converting and electronically doubling the X-ray image of a sample and a phosphor screen 13 for converting the electron image into a visual light a vacuum vessel 8 are grounded. A high voltage is applied among the MCP emitting side 12, the MCP incident side 11 and the phosphor screen 13. On the other hand, the vacuum in the vacuum vessel 8 is detected by a vacuum meter 16, and the high voltage applied to the MCP incident side 11 and the phosphor screen 13 is immediately fallen to the ground level when a switching means (switching circuit) control system 17 detects a reduction in vacuum.
SUGIZAKI KATSUMI
NAGATA HIROSHI
KONDO HIROYUKI
