Title:
X-RAY DIFFRACTION APPARATUS
Document Type and Number:
Japanese Patent JP2012007935
Kind Code:
A
Abstract:
To provide an X-ray diffraction apparatus having an improved measurement accuracy.
An X-ray diffraction apparatus 10 includes an X-ray generation part 22, a two-dimensional detector 50, and a slit plate 40. The X-ray generation part 22 generates X-ray and irradiates the X-ray to a sample 30. The two-dimensional detector 50 two-dimensionally receives the X-ray diffracted by the sample 30 and detects the X-ray at each point in the light receiving area thereof. The slit plate 40 is disposed on the light path of the X-ray between the sample 30 and the two-dimensional detector 50 and partially blocks the X-ray diffracted by the sample 30.
Inventors:
IIHARA JUNJI
Application Number:
JP2010142547A
Publication Date:
January 12, 2012
Filing Date:
June 23, 2010
Export Citation:
Assignee:
SUMITOMO ELECTRIC INDUSTRIES
International Classes:
G01N23/20
Domestic Patent References:
| JP2003185604A | 2003-07-03 | |||
| JP2003083915A | 2003-03-19 | |||
| JP2000081399A | 2000-03-21 |
Attorney, Agent or Firm:
Kuro Fukami
Toshio Morita
Yoshihei Nakamura
Yutaka Horii
Masayuki Sakai
Nobuo Arakawa
Masato Sasaki
Toshio Morita
Yoshihei Nakamura
Yutaka Horii
Masayuki Sakai
Nobuo Arakawa
Masato Sasaki
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