PURPOSE: To obtain an X-ray intensity 2.5W5 times as high as the intensity available in prior arts and to improve the work efficiency of X-ray exposure, by synchronizing a driving section for vibrating a mirror with a driving section for vibrating a beryllium window by means of a control section.
CONSTITUTION: An X-ray 14 taken from synchrotron radiation light 13 is reflected by a mirror 15 which is vibrated by a driving section 22. The X-ray 14 is applied to an exposure chamber 17 through a beryllium window 16. The window 16 is vibrated vertically by a driving section 33. The operations of the driving sections 22 and 33 are synchronized by a control section 34, whereby the vibration of the mirror 15 is synchronized with the vibration of the window 16 and exposure can be obtained always with an extent of 5mm×50mm. Thus, an X-ray intensity 2.5W5 times as high as that available in prior arts can be obtained and the work efficiency of X-ray exposure can be improved.
HONJO ICHIRO
SUGISHIMA KENJI
