A transmissive target and an X-ray generator with the transmissive target

Title:

A transmissive target and an X-ray generator with the transmissive target

Document Type and Number:

Japanese Patent JP6335729

Kind Code:

B2

Abstract:

A transmissive-type target includes a target layer (22) including a target material, and a transmissive substrate (21) including polycrystalline diamond and configured to support the target layer (22). The transmissive substrate (21) includes a first surface (24) having a first average crystal grain diameter and a second surface (25) opposite the first surface (24) and having a second average crystal grain diameter larger than the first average crystal grain diameter. The target layer (22) is supported by any one of the first surface (24) and the second surface (25).

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Inventors:

Shuji Yamada
Takao Ogura
Yoichi Igarashi
Takeo Tsukamoto
Yoshiyuki Yoshitake

Application Number:

JP2014184462A

Publication Date:

May 30, 2018

Filing Date:

September 10, 2014

Export Citation:

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Assignee:

Canon Inc

International Classes:

H01J35/08; H01J9/14

Domestic Patent References:

JP2003505845A
JP2013160637A
JP2012256444A
JP2006176389A
JP7276106A
JP2008001562A
JP10081586A

Foreign References:

US6319610

Attorney, Agent or Firm:

Takuma Abe
Sogo Kuroiwa

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