PURPOSE: To simplify the table moving mechanism, by providing an X ray detector which is movable in the direction different from the movement of a table within a radiation range of X rays generated from an X ray generator in such a manner as to get tight on the table.

CONSTITUTION: A table 3 is held with a drive section 22 provided on a thread rod 21 to be turned with a motor and a holding section 24 provided on a shaft 23 and can be moved in the Y direction by a straight movable drive section 22 with the turning of thread rod 21. An X-ray detector 5 is set in such a manner as to make the gap G with the table 3 close tight and mounted on a straight movable drive section 26 with a thread rod 25 to be turned with the motor so that it can move in the direction X centered on the focal position P of X rays 2 generated from an X-ray generator 1. Thus, the table 3 is moved in the directions Y1 and Y2 as required while the X-ray detector 5 is moved in the directions X1 and X2 to enable the inspection of all objects 4 to be inspected arranged on the table 3.