To provide an X-ray inspection apparatus in which a current flowing to a steering coil for X-ray deflection in an X-ray tube is adjusted easily and which can make the output of an X-ray detection device maximum.
Electrons are emitted from a cathode filament 1 to which a negative high voltage is applied, they are converged by a Wehnelt electrode 2, and they are accelerated to a high speed by an anode 3 so as to enter a hole in the center of the anode 3. Their electron beam is deflected by the steering coil 4, and it is converged by a focus coil 5 so as to collide with a target 6. Generated transmission-direction X-rays are incident on the X-ray image detection device 7 so as to enter a PC 8 as a luminance-output image signal. An X-Y deflection instruction signal is output by optical-axis auxiliary software 9, a current value flowing to the steering coil 4 via an X-ray controller 10 is changed, and an X-Y deflection value which makes the image signal maximum is set automatically.
JPH07260713A | 1995-10-13 | |||
JPH03190043A | 1991-08-20 | |||
JPH02138856A | 1990-05-28 | |||
JPH09505686A | 1997-06-03 | |||
JPH08212951A | 1996-08-20 | |||
JPH11502357A | 1999-02-23 |
WO2000058991A1 | 2000-10-05 |
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