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Title:
X-RAY INSPECTION APPARATUS
Document Type and Number:
Japanese Patent JP2003004668
Kind Code:
A
Abstract:

To provide an X-ray inspection apparatus in which a current flowing to a steering coil for X-ray deflection in an X-ray tube is adjusted easily and which can make the output of an X-ray detection device maximum.

Electrons are emitted from a cathode filament 1 to which a negative high voltage is applied, they are converged by a Wehnelt electrode 2, and they are accelerated to a high speed by an anode 3 so as to enter a hole in the center of the anode 3. Their electron beam is deflected by the steering coil 4, and it is converged by a focus coil 5 so as to collide with a target 6. Generated transmission-direction X-rays are incident on the X-ray image detection device 7 so as to enter a PC 8 as a luminance-output image signal. An X-Y deflection instruction signal is output by optical-axis auxiliary software 9, a current value flowing to the steering coil 4 via an X-ray controller 10 is changed, and an X-Y deflection value which makes the image signal maximum is set automatically.


Inventors:
EDAHIRO MASAMI
Application Number:
JP2001192458A
Publication Date:
January 08, 2003
Filing Date:
June 26, 2001
Export Citation:
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Assignee:
SHIMADZU CORP
International Classes:
G01N23/04; G21K5/02; H01J35/14; H05G1/00; (IPC1-7): G01N23/04; G21K5/02; H01J35/14; H05G1/00
Domestic Patent References:
JPH07260713A1995-10-13
JPH03190043A1991-08-20
JPH02138856A1990-05-28
JPH09505686A1997-06-03
JPH08212951A1996-08-20
JPH11502357A1999-02-23
Foreign References:
WO2000058991A12000-10-05
Attorney, Agent or Firm:
Toshifumi Kita (1 person outside)