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Title:
X-RAY INSPECTION DEVICE USING INDUSTRIAL ROBOT ARM AND X-RAY INSPECTION METHOD
Document Type and Number:
Japanese Patent JP2023054438
Kind Code:
A
Abstract:
To provide an X-ray inspection device and X-ray inspection method which enables only one equipment to perform an X-ray inspection requiring inspection conditions different for each inspection object by using industrial robot arms with a high degree of freedom and multi-shaft drive mechanisms, can be used in both of a development process and a manufacturing process, and also is effective for realizing automatization, remote operations, and robotization in a next-generation factory.SOLUTION: An X-ray inspection device 100 performs: radiating an X-ray to an inspected body 3 from an X-ray generator 1; detecting a transmitted dose by an X-ray detector 2; and acquiring an inspection image of the inspected body 3. The device comprises: a pair of industrial robot arms 10, 20 including the first industrial robot arm 10 which has a multi-shaft mechanism and to which the X-ray generator 1 is attached, and the second industrial robot arm 20 which has a multi-shaft drive mechanism and to which an X-ray detector 2 is attached; a rotation mechanism 30 for rotating the pair of industrial robot arms 10, 20; and a conveyor mechanism 40 for conveying the inspected body 3 to be set between the X-ray generator 1 and the X-ray generator 2.SELECTED DRAWING: Figure 1

Inventors:
NAITO YOSHIKAZU
MATSUI TAKUMA
Application Number:
JP2021163280A
Publication Date:
April 14, 2023
Filing Date:
October 04, 2021
Export Citation:
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Assignee:
CHIYUUGAI TECHNOS KK
International Classes:
G01N23/046
Attorney, Agent or Firm:
Takayuki Nobusue
Yasuo Mihara