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Patent Searching and Data


Title:
X-RAY INSPECTION DEVICE
Document Type and Number:
Japanese Patent JP2006300887
Kind Code:
A
Abstract:

To provide an X-ray inspection device capable of performing zero-point correction, while inspecting a work, and reducing dispersion of accuracy caused by temperature drift or the like.

In this X-ray inspection device for measuring the volume of the work based on a radiogram, its processing unit 6 includes a data conversion processing part 62 for applying conversion processing from radiogram density data in each transmission domain to density data of an equivalent thickness image in the transmission domain, and a volume measuring part 63 for measuring the volume of the work in the plurality of transmission domains based on the density data of the equivalent thickness image, and a zero-point correction part 61 for processing data equivalent to an X-ray transmission amount and performing zero-point correction of the radiogram density data so that the equivalent thickness of a background when irradiating the work with the X-ray becomes zero, and the zero-point correction part 61 executes zero-point correction corresponding to a period for measuring the volume of the work.


Inventors:
Nagatsuka, Kazutake
Yamazaki, Masahide
Yamazaki, Takeshi
Yagi, Masahiro
Application Number:
JP2005000126794
Publication Date:
November 02, 2006
Filing Date:
April 25, 2005
Export Citation:
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Assignee:
ANRITSU SANKI SYSTEM CO LTD
International Classes:
G01B15/00; G01F25/00; G01N23/04; G01B15/00; G01F25/00; G01N23/02