Title:
毛細管光学系を含むX源を有するX線照射装置
Document Type and Number:
Japanese Patent JP4370057
Kind Code:
B2
Abstract:
Generally known conventional X-ray tubes include a window opening which is covered by an X-ray transparent X-ray window which is usually made of beryllium. A significant absorption of X-rays of comparatively long wavelength, for example of the order of magnitude of from 1 nm to 10 nm, occurs in such windows. According to the invention, a bundle of X-ray conducting capillary tubes (46) is connected to the window opening of the X-ray tube, the other end (48) of the bundle being provided with a very thin X-ray window (50) which seals the interior of the capillary tubes (46), being in vacuum contact with the vacuum space of the X-ray tube, from the environment in a vacuum tight manner.
Inventors:
Fan Sprang, Hendriqua
Application Number:
JP2000577691A
Publication Date:
November 25, 2009
Filing Date:
September 22, 1999
Export Citation:
Assignee:
Panalytical BV
International Classes:
G01N23/207; H01J35/18; G01N23/223; G03F7/20; G21K1/06; G21K5/00; G21K5/02; G21K5/04; H01J35/00; H05G1/02
Domestic Patent References:
| JP9180661A | ||||
| JP7294700A | ||||
| JP5066300A |
Attorney, Agent or Firm:
Tadahiko Ito