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Title:
X-RAY MEASURING APPARATUS AND METHOD THEREFOR
Document Type and Number:
Japanese Patent JP2000155102
Kind Code:
A
Abstract:

To shorten time required in the measurement of X-ray reflectivity or locking curve and to realize the measurement with an X-ray measuring apparatus of simple constitution.

An X-ray measuring apparatus is equipped with an X-ray source 1 emitting X-rays from a minute focus, a reflector 3 for reflecting X-rays emitted from the X-ray source 1 to converge reflected X-rays in one direction and a curved monochromator 2 for making X-rays emitted from the X-ray source monochromatic to be reflected the same and converging the reflected X-rays in a direction crossing the converging direction by the reflector almost at right angles. Herein, the reflector 3 and the curved monochrometer 2 are positioned so that the respective converging points of X-rays almost coincide with each other, and a sample S is arranged at the converging point of the monochromater 2 and X-rays reflected by the sample are detected by an X-ray detector 4.


Inventors:
KIKUCHI TETSUO
Application Number:
JP32999898A
Publication Date:
June 06, 2000
Filing Date:
November 19, 1998
Export Citation:
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Assignee:
RIGAKU DENKI CO LTD
International Classes:
G01N23/201; (IPC1-7): G01N23/201
Attorney, Agent or Firm:
Toshitake Yamamoto