Title:
X-RAY MEASURING INSTRUMENT AND X-RAY MEASURING METHOD
Document Type and Number:
Japanese Patent JP2002250704
Kind Code:
A
Abstract:
To measure the partial region of a sample without using a collimator or without accurately arranging a collimator at a specific position close to the sample even if the collimator is used.
The X-ray measuring instrument has an X-ray source for generating X-rays R0 applied to the sample S and an X-ray detector for detecting the X-rays R1 diffracted by the sample S and also has a mask 9 for covering the X-ray irradiation surface of the sample S. The mask 9 is formed from a single crystal substance and has an aperture 15 permitting X-ray R0 to pass. The partial region S0 of the sample S controlled by the aperture 15 can be set to a measuring object.
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Inventors:
DOSHIYOU AKIHIDE
Application Number:
JP2001049834A
Publication Date:
September 06, 2002
Filing Date:
February 26, 2001
Export Citation:
Assignee:
RIGAKU DENKI CO LTD
International Classes:
G01N23/20; G01T1/00; G01T1/29; G21K1/02; G21K1/06; (IPC1-7): G01N23/20; G01T1/00; G01T1/29; G21K1/02; G21K1/06
Attorney, Agent or Firm:
Kuniaki Yokokawa
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