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Patent Searching and Data


Title:
X-RAY PROJECTOR
Document Type and Number:
Japanese Patent JPS5760645
Kind Code:
A
Abstract:

PURPOSE: To simplify the constitution of X-ray projector and make exposure in the air possible, by providing a gas ejecting device, which may be blast such a gas neither reacting to an X-ray take out window not generating a gass reacting to the window.

CONSTITUTION: A number of ejection orifice of nozzle 8 are arranged in a line so that gas blows all over the window 4. The nozzle 8 are connected by a pipe to a gas cylinder, so that the gas may flow for example, under 1kg/cm2 pressure at several l/min flow rate. On the other hand, the applicable gas is such a gas not reaction to the thin plate of an X-ray take out window 4 made from the brylium, aluminum or the like and not generating ozone reacting to the material of the window 4. Then, nitrogen, helium, argon or the like of high purity over 99% and with small partial pressure of oxygen in used. Thereby, the breakage accident of the window 4 or the like can be prevented, the exposure in the air becomes allowable, and the unit can be made in a small size and a simple structure.


Inventors:
KITAMURA YOSHITAKA
OKABE MASAHIRO
FURUKAWA YASUO
Application Number:
JP13376880A
Publication Date:
April 12, 1982
Filing Date:
September 26, 1980
Export Citation:
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Assignee:
FUJITSU LTD
International Classes:
H01J35/16; G03F7/20; G21K5/00; G21K5/02; H01J35/18; H01L21/027; (IPC1-7): G21K5/00; H01J35/16; H01L21/30