Title:
X-ray thin film inspection equipment
Document Type and Number:
Japanese Patent JP6351741
Kind Code:
B2
Abstract:
An X-ray thin film inspection device according to the present invention has an X-ray irradiation unit 40 mounted in a first rotation arm 32, an X-ray detector 50 mounted in a second rotation arm 33, a fluorescence X-ray detector 60 for detecting fluorescent X-ray occurring from an inspection target due to irradiation of X-ray, a temperature measuring unit 110 for measuring the temperature corresponding to the temperature of the X-ray thin film inspection device, and a temperature correcting system (central processing unit 100) for correcting an inspection position on the basis of the temperature measured by the temperature measuring unit 110.
Inventors:
Kiyoshi Ogata
Kazuhiko Omote
Yoshiyasu Ito
Hiroshi Honda
Yoshida Sosei
Takahashi Hideaki
Kazuhiko Omote
Yoshiyasu Ito
Hiroshi Honda
Yoshida Sosei
Takahashi Hideaki
Application Number:
JP2016553775A
Publication Date:
July 04, 2018
Filing Date:
October 14, 2014
Export Citation:
Assignee:
Rigaku Corporation
International Classes:
G01N23/223; G01N23/2206
Domestic Patent References:
| JP2006153767A | ||||
| JP9218170A |
Other References:
M.Beck et al.,Simultaneous determination of specimen temperature and specimen displacement in high-temperature X-ray diffractometry applying Bragg-Brentano geometry,Journal of Applied Crystallography,2002年,Vol.35 No.1,pp.103-107
Attorney, Agent or Firm:
Toshitake Yamamoto