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Title:
X-RAY TUBE
Document Type and Number:
Japanese Patent JP2009205895
Kind Code:
A
Abstract:

To solve the problem that, while a thickness gauge or the like uses a zone plate or the like for paralleling or converging X-rays because X-rays irradiated from an X-ray tube are diffused, the zone plate absorbs X-rays to weaken the X-ray intensity, and also an arrangement situation of a measuring sample, the X-ray tube and the zone plate may change the X-ray intensity to vary a measuring accuracy.

A plurality of annular zones having X-ray transmissivity alternately changing are formed on a surface of a target base material generating X-rays or a window member extracting X-rays to make X-rays being paralleled or converged. Also, a target base material is vapor-deposited on the inner surface of microcapillaries for paralleling X-rays to serve the microcapillaries as a target base. The X-rays being paralleled or converged are obtained by using the X-ray tube alone, so that a constitution of a device can be simplified. Furthermore, reduction of a measuring accuracy can be prevented even when the alignments of an object to be measured and the X-ray tube change.


Inventors:
Ohigata, Yoshihiko
Koga, Yusaku
Nishida, Kazufumi
Application Number:
JP2008000045843
Publication Date:
September 10, 2009
Filing Date:
February 27, 2008
Export Citation:
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Assignee:
YOKOGAWA ELECTRIC CORP
International Classes:
H01J35/08; H01J35/18
Domestic Patent References:
JP2003007237A
JP2006017653A
JP2007188732A
JP2003007237A
JPH03259800A