Title:
(X), (Y) PRECISE POSITIONING DEVICE
Document Type and Number:
Japanese Patent JPH02176502
Kind Code:
A
Abstract:
PURPOSE:To execute precise positioning by a comparatively simple constitution by providing an (xy) stage, a concave mirror and a position detector. CONSTITUTION:To an (xy) stage 1, a bracket 4 for supporting a concave mirror 3 is fixed, and in a detection box 2, a position detector 5 for photodetecting a reflected light from the concave mirror 3 is provided. In this state, since the stage 1 and the concave mirror 3 are interlocked with each other, a position of the stage 1 is reflected exactly on a position of a reflected light on the detector 5. In such a way, precise positioning of the stage 1 can be executed. Also, by using an objective lens of high magnification as an objective lens in front of the detector 5, a position resolution can be improved. That is, a two-dimensional position detection is executed by the detector 5, and an (x) axis motor and a (y) axis motor are driven, based thereon, therefore, precise positioning can be executed by a comparatively simple circuit.
Inventors:
ISHIMOTO AKINORI
Application Number:
JP33230188A
Publication Date:
July 09, 1990
Filing Date:
December 28, 1988
Export Citation:
Assignee:
ASAHI OPTICAL CO LTD
International Classes:
G01B11/00; (IPC1-7): G01B11/00
Attorney, Agent or Firm:
Takaishi Tachibana