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Patent Searching and Data


Title:
X-Y STAGE
Document Type and Number:
Japanese Patent JPS6288528
Kind Code:
A
Abstract:

PURPOSE: To simplify the assembly work by using the side surface along the longitudinal direction of a stator as base guide, in an X-Y stage in which a linear motor is arranged onto a surface plate and a stage is arranged in the crossing part between the cross guides which cross at right angles between the shift elements.

CONSTITUTION: A linear motor 2 is arranged on a surface plate 1, and a free stage 4 is supported onto the crossing part between cross guides 3 and 4. Said linear motor 2 consists of the shift element 2b of a stator 2a, and in the intermediate part of the outside yokes 21a and 22a of the stator 2a, a center yoke 23a is arranged. The shift element 2b is formed by winding a driving coil 26b onto the outside of a conductor bobbin 25b inserted into the center yoke 23a and installing and fixing the edge parts of the cross guides 3 and 4 onto the upper surface. An air bearing 6 is installed at the both edges of each cross guide 3, 4, and the pressurized air injection ports 61 and 62 are formed. The captioned X-Y stage does not necessitate a special base guide.


Inventors:
KOSHIBA YOSHIHITO
Application Number:
JP23063485A
Publication Date:
April 23, 1987
Filing Date:
October 15, 1985
Export Citation:
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Assignee:
OMRON TATEISI ELECTRONICS CO
International Classes:
B23Q1/26; B23Q1/38; B23Q1/62; H01L21/67; H01L21/68; H02K41/02; (IPC1-7): B23Q1/26; H01L21/68
Attorney, Agent or Firm:
Suzuki Yoshimitsu