Title:
XYステージ
Document Type and Number:
Japanese Patent JP4348620
Kind Code:
B2
More Like This:
| JPH01164583 | END EFFECTOR |
Inventors:
Yutaka Koizumi
Application Number:
JP2004146538A
Publication Date:
October 21, 2009
Filing Date:
May 17, 2004
Export Citation:
Assignee:
Yokogawa Electric Corporation
International Classes:
G05D3/12; G12B5/00; H02P29/00; H02P29/50
Domestic Patent References:
| JP6225568A | ||||
| JP2003250295A | ||||
| JP2001037287A | ||||
| JP2004038426A |