Title:
半導体製造装置におけるXYテーブル
Document Type and Number:
Japanese Patent JP4021158
Kind Code:
B2
Abstract:
An XY table used in a semiconductor manufacturing apparatus including lower (X table) fixed to an X movable element and an upper table (Y table) fixed to a Y movable element, in which the upper table (Y table) is supported movably in a Y direction and immovably in an X direction on the lower table (X table), the X movable element is immovable in the Y direction with respect to the X motor main body, the Y movable element is movable in the X direction with respect to the Y motor main body. Furthermore, the Y motor main body is provided with a permanent magnet that covers an entire region of movement of a magnetic action component (coils) of the Y movable element in the X direction.
Inventors:
Ryuichi Kyomasu
Hiroto Urabayashi
Minoru Torihata
Kuniyuki Takahashi
Miyahara Satoshi
Hiroto Urabayashi
Minoru Torihata
Kuniyuki Takahashi
Miyahara Satoshi
Application Number:
JP2001131856A
Publication Date:
December 12, 2007
Filing Date:
April 27, 2001
Export Citation:
Assignee:
Shinkawa Co., Ltd.
International Classes:
G12B5/00; H01L21/68; G05D3/12; H01L21/50; H01L21/52; H01L21/60
Domestic Patent References:
| JP2001112234A | ||||
| JP2002198282A | ||||
| JP5544694A |
Attorney, Agent or Firm:
Kenji Yoshida
Jun Ishida
Jun Ishida