Title:
XY DRIVING DEVICE HAVING LINEAR ELECTROMAGNETIC ACTUATOR
Document Type and Number:
Japanese Patent JP3695542
Kind Code:
B2
Abstract:
PURPOSE: To attain operation with high accuracy and at high speed by providing a first track rail parallelly fixed to one of a pair or plural pairs of relative moving members, a second track rail fixed parallelly to the other of a pair or plural pairs of relative moving members so as to cross the first track rail, and a plurality of sliding bases between the crossing portions so as to be slidable with the track rails.
CONSTITUTION: A plurality of groups of first track rail, each group consisting at least one, are fixed to one of a head 101 and a moving table 102 parallelly thereto. A plurality of groups of second track rail, each group consisting at least one, are fixed to the other of the head 101 and the moving table 102, so as to cross the first track rails. Movable parts as sliding bases are arranged between the crossing parts slidably against the track rails. A linear dc motor is arranged in every group of the track rails. Variation of moving distances caused by sliding resistance is eliminated, and twisting of the moving table 102 is prevented. It is thus possible to conduct positioning with high accuracy, and attain high speed operation because operation speed of the motor is that of the moving table 102.
Inventors:
Seiji Takei
Application Number:
JP5142194A
Publication Date:
September 14, 2005
Filing Date:
February 23, 1994
Export Citation:
Assignee:
Nippon Thompson Co., Ltd.
International Classes:
B23Q5/28; B23Q1/00; B23Q1/62; F16C29/06; G05B19/18; H02K41/02; (IPC1-7): B23Q1/62; B23Q5/28; F16C29/06; H02K41/02
Domestic Patent References:
| JP2116442A | ||||
| JP1301033A | ||||
| JP5346119A | ||||
| JP6225141U | ||||
| JP4141339A |
Attorney, Agent or Firm:
Onaka Kazumune