PURPOSE: To simplify the mechanical structure of a movement control portion while an XY table height is restrained to a low one, by providing one drive source alone on a fixed side, providing the other drive source at a movement guide driven by this.

CONSTITUTION: A pair of X guides 21 is provided in parallel with each other on a fixed base 20, and a pair of X sliders 22 working as movement guides in an X direction and a motor driving X sliders 22 are provided. And, a Y guide 23 is directed in a perpendicular direction against the X direction and integrated with an X slider 22 at the same level with that of the X slider 22. In addition, a motor whose purpose is that an X slider 22 drives a Y slider 24 on a Y guide 23, is provided, and a stage 25 is provided integrally with Y sliders 24. As a result, in spite of a general-purpose XY table whose height is kept down, its drive portion does not become complicated as the guides to move the stage can do with one kind to each of X and Y.